美國MKS閥門 MKS 153B/253B/653B排氣節(jié)流閥
美國MKS 153B智能排氣節(jié)流閥專為電腦控制的應用where a simple pressure control system is desired the一個簡單的壓力控制系統(tǒng)的期望,Type 153 Valve integrates all control communication and153型閥集成了所有的控制,通信,和driver circuits via a compact “add-on” electronics module驅動電路通過一個緊湊的“附加”的電子模塊within a Type 253 Throttle Valve assembly eliminating the253型節(jié)流閥總成內,消除need for a separate pressure control electronics module.一個單獨的壓力控制電子模塊。The 153 is operable in two modes flapper positioning or153在兩種模式操作,擋板定位或pressure control.壓力For DeviceNet? communications consult ApplicationsDeviceNet?通信咨詢應用Engineering on the Type 683.在683型。
MKS 253型排氣節(jié)流閥調節(jié)removal of gas from a processing system. Its flapper從處理系統(tǒng)去除氣體。它的擋板is positioned to modulate gas flow thereby controlling設置調節(jié)氣體的流量,從而控制process pressure. The 253 has a non-linear actuator工藝過程的壓力。253有一個非線性執(zhí)行器placed between the flapper shaft and the motor drive shaft把擋板軸和電機軸之間in order to generate a linear valve transfer characteristic為了產(chǎn)生一個線性閥的傳遞特性and provide smooth linear pressure control. The MKS Type并提供平穩(wěn)的線性壓力控制。MKS型253 is available in standard sizes and flange styles and is253在標準尺寸和法蘭是可用的,并compatible with all MKS throttle valve controllers.所有的MKS節(jié)流閥控制器兼容。
美國MKS 653B排氣節(jié)流閥高速電機和齒輪或驅動組件provides fast response to a given set point to quickly提供快速響應一個給定的設定點的快速achieve desired pressure and increase system throughput.達到所需的壓力和增加系統(tǒng)的吞吐量。High accuracy is attained by micro-stepping the flapper to高精度的步進擋板微達到give more precise control and no drift of pressure at the給出了更的控制,無漂移,在壓力desired set point. The 653 has sufficient torque to operate設定點。653有足夠的扭矩操作sealing valves up to four inches and non-sealing valves to閥門的密封和非密封高達四英寸的閥門12 inches to prevent clogging from contamination buildup.12英寸,防止堵塞污染積累。The valve body can be heated up to 150°C (using optional閥體可加熱到150°C(使用可選sealing materials) for operation in high temperature密封材料)操作在高溫度applications and processes. The Type 653 has a flapper應用程序和進程。653型有一個擋板position indicator to identify valve angle during system位置指示器在系統(tǒng)識別閥角troubleshooting is available in a variety of sizes and flange故障排除,有各種尺寸和法蘭styles and is compatible with MKS Type 651 and 1651風格,并與MKS型651和1651兼容Controllers.控制器。
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美國MKS閥門 MKS 153B/253B/653B排氣節(jié)流閥
美國MKS 153B智能排氣節(jié)流閥專為電腦控制的應用where a simple pressure control system is desired the一個簡單的壓力控制系統(tǒng)的期望,Type 153 Valve integrates all control communication and153型閥集成了所有的控制,通信,和driver circuits via a compact “add-on” electronics module驅動電路通過一個緊湊的“附加”的電子模塊within a Type 253 Throttle Valve assembly eliminating the253型節(jié)流閥總成內,消除need for a separate pressure control electronics module.一個單獨的壓力控制電子模塊。The 153 is operable in two modes flapper positioning or153在兩種模式操作,擋板定位或pressure control.壓力For DeviceNet? communications consult ApplicationsDeviceNet?通信咨詢應用Engineering on the Type 683.在683型。
MKS 253型排氣節(jié)流閥調節(jié)removal of gas from a processing system. Its flapper從處理系統(tǒng)去除氣體。它的擋板is positioned to modulate gas flow thereby controlling設置調節(jié)氣體的流量,從而控制process pressure. The 253 has a non-linear actuator工藝過程的壓力。253有一個非線性執(zhí)行器placed between the flapper shaft and the motor drive shaft把擋板軸和電機軸之間in order to generate a linear valve transfer characteristic為了產(chǎn)生一個線性閥的傳遞特性and provide smooth linear pressure control. The MKS Type并提供平穩(wěn)的線性壓力控制。MKS型253 is available in standard sizes and flange styles and is253在標準尺寸和法蘭是可用的,并compatible with all MKS throttle valve controllers.所有的MKS節(jié)流閥控制器兼容。
美國MKS 653B排氣節(jié)流閥高速電機和齒輪或驅動組件provides fast response to a given set point to quickly提供快速響應一個給定的設定點的快速achieve desired pressure and increase system throughput.達到所需的壓力和增加系統(tǒng)的吞吐量。High accuracy is attained by micro-stepping the flapper to高精度的步進擋板微達到give more precise control and no drift of pressure at the給出了更的控制,無漂移,在壓力desired set point. The 653 has sufficient torque to operate設定點。653有足夠的扭矩操作sealing valves up to four inches and non-sealing valves to閥門的密封和非密封高達四英寸的閥門12 inches to prevent clogging from contamination buildup.12英寸,防止堵塞污染積累。The valve body can be heated up to 150°C (using optional閥體可加熱到150°C(使用可選sealing materials) for operation in high temperature密封材料)操作在高溫度applications and processes. The Type 653 has a flapper應用程序和進程。653型有一個擋板position indicator to identify valve angle during system位置指示器在系統(tǒng)識別閥角troubleshooting is available in a variety of sizes and flange故障排除,有各種尺寸和法蘭styles and is compatible with MKS Type 651 and 1651風格,并與MKS型651和1651兼容Controllers.控制器。
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